Featured Research

from universities, journals, and other organizations

Lucent And Beta Squared To Jointly Develop Mask Cleaning Technology For Scalpel Electron-Beam Lithography System

Date:
July 13, 1998
Source:
Bell Labs - Lucent Technologies
Summary:
Lucent Technologies has signed an agreement with Beta Squared, Inc., a subsidiary of Photronics, Inc., to jointly develop a mask cleaning technology for Lucent's SCALPEL electron-beam lithography program - a step Lucent expects to accelerate the commercialization of its next-generation lithography approach for defining semiconductor features.

Lucent Technologies has signed an agreement with Beta Squared, Inc., a subsidiary of Photronics, Inc., to jointly develop a mask cleaning technology for Lucent's SCALPEL electron-beam lithography program - a step Lucent expects to accelerate the commercialization of its next-generation lithography approach for defining semiconductor features.

The SCALPEL system projects a high-energy beam of electrons through a patterned scattering mask onto a silicon wafer to create integrated circuit features that are just 0.08 microns wide. This approach overcomes many of the limits placed on the semiconductor industry by current optical lithography systems.

"Lucent, after evaluating and analyzing other potential cleaning technologies, has initiated work with Beta Squared to adapt its PLASMAX cleaning technology for SCALPEL masks," said Lloyd Harriott, head of the SCALPEL program at Bell Labs, Lucent's research and development arm. Currently, Lucent is teaming with Beta Squared's parent company, Photronics, to establish a commercial source of SCALPEL masks.

The cleaning process is crucial because particles on the mask may result in printing defects in the photoresist-coated silicon wafer. "Beta's dry process, which is totally environmentally friendly, uses only inert gases, mechanical vibration and inherent forces present in a plasma environment," said John Festa, vice president of Beta Squared's plasma division. Beta's PLASMAX approach cleans each mask within 25 seconds.

International SEMATECH, an Austin, Texas-based semiconductor manufacturing research consortium, is helping to fund the joint research program at Beta Squared's Allen, Texas, facility. Currently, International SEMATECH is generating an extensive database that will lead to an industry consensus on the next generation of lithography technology.

Today's chip manufacturing systems produce features as small as 0.25 microns, and next-generation optical lithography systems promise to produce features as small as 0.13 microns. The SCALPEL system, meanwhile, uses a beam of electrons, whose wavelength is much shorter than the ultraviolet light used in optical lithography, to print the 0.08-micron features.

Lucent Technologies, headquartered in Murray Hill, N.J., designs, builds and delivers a wide range of public and private networks, communications systems and software, data networking systems, business telephone systems and microelectronics components. Bell Laboratories is the research and development arm for the company. For more information on Lucent Technologies, visit the company's web site at http://www.lucent.com or the SCALPEL web site at http://www.bell-labs.com/project/SCALPEL.

Beta Squared is a wholly owned subsidiary of Photronics, Inc., a leading global supplier of photomask manufacturing technology and services. Beta Squared is headquartered in Allen, Texas, where it designs, builds and services a large installed base of plasma etch and wafer dry cleaning systems. Additional information about the company can be accessed at http://www.photronics.com.


Story Source:

The above story is based on materials provided by Bell Labs - Lucent Technologies. Note: Materials may be edited for content and length.


Cite This Page:

Bell Labs - Lucent Technologies. "Lucent And Beta Squared To Jointly Develop Mask Cleaning Technology For Scalpel Electron-Beam Lithography System." ScienceDaily. ScienceDaily, 13 July 1998. <www.sciencedaily.com/releases/1998/07/980713101222.htm>.
Bell Labs - Lucent Technologies. (1998, July 13). Lucent And Beta Squared To Jointly Develop Mask Cleaning Technology For Scalpel Electron-Beam Lithography System. ScienceDaily. Retrieved October 20, 2014 from www.sciencedaily.com/releases/1998/07/980713101222.htm
Bell Labs - Lucent Technologies. "Lucent And Beta Squared To Jointly Develop Mask Cleaning Technology For Scalpel Electron-Beam Lithography System." ScienceDaily. www.sciencedaily.com/releases/1998/07/980713101222.htm (accessed October 20, 2014).

Share This



More Computers & Math News

Monday, October 20, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Facebook Says The DEA's Fake Accounts Go Too Far

Facebook Says The DEA's Fake Accounts Go Too Far

Newsy (Oct. 19, 2014) Facebook says the DEA violated its Terms of Service and that such impersonations damage the integrity of the site. Video provided by Newsy
Powered by NewsLook.com
Court Ruling Means Kids' Online Activity Could Be On Parents

Court Ruling Means Kids' Online Activity Could Be On Parents

Newsy (Oct. 17, 2014) In a ruling attorneys for both sides agreed was a first of its kind, a Georgia appeals court said parents can be held liable for what kids put online. Video provided by Newsy
Powered by NewsLook.com
For Google, Even A $16.5 Billion Earnings Report Is A Miss

For Google, Even A $16.5 Billion Earnings Report Is A Miss

Newsy (Oct. 17, 2014) Analysts were expecting more, but Google’s ad growth slowed on the quarter and the company is spending more of its money. Video provided by Newsy
Powered by NewsLook.com
Obama Signs Cybersecurity Order, Wants Safer Payments

Obama Signs Cybersecurity Order, Wants Safer Payments

Reuters - US Online Video (Oct. 17, 2014) President Barack Obama announces details of a new executive order designed to make federal payments safer following recent massive data breaches. Rough Cut (no reporter narration). Video provided by Reuters
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:

Strange & Offbeat Stories


Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins