Featured Research

from universities, journals, and other organizations

Next-Generation Semiconductor Manufacturing -- Lucent's SCALPEL Electron-Beam Lithography System

Date:
October 26, 1998
Source:
Bell Labs - Lucent Technologies
Summary:
Lucent Technologies has signed an agreement with MCNC's MEMS Technology Application Center to supply commercial-quality mask blanks for Lucent's SCALPEL electron-beam lithography program. Lucent expects this step to accelerate the commercialization of SCALPEL, its next-generation lithography approach for manufacturing semiconductor chips.

MURRAY HILL, N.J. -- Lucent Technologies has signed an agreement with MCNC's MEMS Technology Application Center to supply commercial-quality mask blanks for Lucent's SCALPEL electron-beam lithography program. Lucent expects this step to accelerate the commercialization of SCALPEL, its next-generation lithography approach for manufacturing semiconductor chips.

The SCALPEL system, developed at Lucent's Bell Labs, projects a high-energy beam of electrons through a patterned scattering mask onto a resist-coated silicon wafer to create integrated circuit features that are just 0.08 microns. This approach overcomes the limits placed on the semiconductor industry by current optical lithography systems and will meet future feature-size criteria -- 0.05 micron features by 2012 -- as outlined in the National Technology Roadmap for Semiconductors.

"To date, Bell Labs has made mask blanks for research purposes," said SCALPEL Program Manager Lloyd Harriott. "This agreement with MCNC is the latest step that shows the SCALPEL technique is fast approaching commercial viability."

After the blank masks are made, patterns are placed on them by two other companies -- Photronics, Inc., and DuPont Photomasks, Inc., which are commercial suppliers of optical masks.

International SEMATECH, an Austin, Texas-based semiconductor manufacturing research consortium, is helping to fund the demonstration of commercial-quality mask production at MCNC, based in Research Triangle Park, N.C. Currently, International SEMATECH is generating an extensive database that will lead to an industry consensus on the next generation of lithography technology.

Today's chip manufacturing systems produce features as small as 0.25 microns, and next-generation optical lithography systems may produce features as small as 0.13 microns. The SCALPEL system, meanwhile, uses a beam of electrons, whose wavelength is much smaller than the ultraviolet light used in optical lithography, to print the 0.08-micron features.

Lucent Technologies, headquartered in Murray Hill, N.J., designs, builds and delivers a wide range of public and private networks, communications systems and software, data networking systems, business telephone systems and microelectronics components. Bell Laboratories is the research and development arm for the company. For more information on Lucent Technologies, visit the company's web site at http://www.lucent.com or the SCALPEL web site at http://www.bell-labs.com/project/SCALPEL.

MCNC is a private, nonprofit technology development and management company. MCNC is recognized as a technology leader in the areas of microelectromechanical systems, advanced networking, high-performance computing, and electronic packaging. The MEMS Technology Application Center has the engineering skills and infrastructure to support product design and development activities through production. More information is available at http://mems.mcnc.org.

###


Story Source:

The above story is based on materials provided by Bell Labs - Lucent Technologies. Note: Materials may be edited for content and length.


Cite This Page:

Bell Labs - Lucent Technologies. "Next-Generation Semiconductor Manufacturing -- Lucent's SCALPEL Electron-Beam Lithography System." ScienceDaily. ScienceDaily, 26 October 1998. <www.sciencedaily.com/releases/1998/10/981026223207.htm>.
Bell Labs - Lucent Technologies. (1998, October 26). Next-Generation Semiconductor Manufacturing -- Lucent's SCALPEL Electron-Beam Lithography System. ScienceDaily. Retrieved July 24, 2014 from www.sciencedaily.com/releases/1998/10/981026223207.htm
Bell Labs - Lucent Technologies. "Next-Generation Semiconductor Manufacturing -- Lucent's SCALPEL Electron-Beam Lithography System." ScienceDaily. www.sciencedaily.com/releases/1998/10/981026223207.htm (accessed July 24, 2014).

Share This




More Computers & Math News

Thursday, July 24, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Robot Parking Valet Creates Stress-Free Travel

Robot Parking Valet Creates Stress-Free Travel

AP (July 23, 2014) 'Ray' the robotic parking valet at Dusseldorf Airport in Germany lets travelers to avoid the hassle of finding a parking spot before heading to the check-in desk. (July 23) Video provided by AP
Powered by NewsLook.com
Six Indicted in StubHub Hacking Scheme

Six Indicted in StubHub Hacking Scheme

AP (July 23, 2014) Six people were indicted Wednesday in an international ring that took over more than 1,000 StubHub users' accounts and fraudulently bought tickets that were then resold. (July 23) Video provided by AP
Powered by NewsLook.com
The Reviews Are In For The Amazon Fire Phone

The Reviews Are In For The Amazon Fire Phone

Newsy (July 23, 2014) Amazon's first smartphone, the Fire Phone, is set to ship this week, and so far the reviews have been pretty mixed. Video provided by Newsy
Powered by NewsLook.com
Bigger Apple Phone, Bigger Orders

Bigger Apple Phone, Bigger Orders

Reuters - Business Video Online (July 22, 2014) Apple is asking suppliers to make 70 to 80 million units of its new larger screen iPhone, a lot more initially than its current model. Fred Katayama reports. Video provided by Reuters
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:
from the past week

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins