Featured Research

from universities, journals, and other organizations

Silicon Chip Manufacture: Flat Fixtures For EUV Exposure

Date:
January 23, 2009
Source:
Fraunhofer-Gesellschaft
Summary:
Exposing silicon wafers to light during chip manufacture requires special fixtures called chucks. Novel electrostatic chucks made of glass ceramics are incredibly flat. This prevents structural distortions on the exposure mask and the silicon chip.

The EUV mask chuck will support the manufacture of silicon chips in the future: It holds the bent exposure mask in place overhead and almost perfectly levels it.
Credit: Copyright Fraunhofer IOF

Exposing silicon wafers to light during chip manufacture requires special fixtures called chucks. Novel electrostatic chucks made of glass ceramics are incredibly flat. This prevents structural distortions on the exposure mask and the silicon chip.

Smaller, even smaller, tiny. Miniaturization in chip manufacture is progressing at an impressive pace. Researchers continue to push the physical limits of semiconductor technology and are developing methods of making circuit elements even smaller and faster. At the same time, the associated processes are having to meet increasingly high requirements.

The experts predict a promising future for EUV lithography – lithography with extremely shortwave ultraviolet light. This works as follows: Light with a wavelength of 13 nanometers is guided through a reflection mask onto the silicon wafers, where it generates nanometer structures. As the exposure processes take place in a vacuum, special fixtures are necessary to accommodate the silicon wafers and the exposure mask, and to hold them firmly in place. The technical term for these is chucks.

Researchers at the Fraunhofer Institute for Applied Optics and Precision Engineering IOF have developed exceptionally precise electrostatic chucks for EUV lithography. “The chucks need to be extremely smooth and even,” says Fraunhofer IOF scientist Dr. Gerhard Kalkowski. “If they are not super-flat, the result is height deviations in the mask, which lead to structural distortions on the silicon chips.” The IOF researchers are using special glass materials and have developed new technologies to increase the levelness of the chucks, with excellent results: While height deviations of over 100 nanometers had been measured previously, the new material reduced them to 74 nanometers, setting a new record. The chuck and the mask virtually merge into a single plane. The IOF chucks also have other advantages: “The material guarantees high holding strengths, distributed across the entire surface, and reduces abrasion,” says Kalkowski. Two properties of great importance to the EUV exposure process.

The researchers’ findings will greatly benefit the chip industry, as chip manufacturers rely particularly on the stability and precision of the chucks in order to be able to use EUV lithography in mass production. Meanwhile, the IOF researchers are working towards their next goal: flatter than 50 nanometers.


Story Source:

The above story is based on materials provided by Fraunhofer-Gesellschaft. Note: Materials may be edited for content and length.


Cite This Page:

Fraunhofer-Gesellschaft. "Silicon Chip Manufacture: Flat Fixtures For EUV Exposure." ScienceDaily. ScienceDaily, 23 January 2009. <www.sciencedaily.com/releases/2009/01/090119081352.htm>.
Fraunhofer-Gesellschaft. (2009, January 23). Silicon Chip Manufacture: Flat Fixtures For EUV Exposure. ScienceDaily. Retrieved July 24, 2014 from www.sciencedaily.com/releases/2009/01/090119081352.htm
Fraunhofer-Gesellschaft. "Silicon Chip Manufacture: Flat Fixtures For EUV Exposure." ScienceDaily. www.sciencedaily.com/releases/2009/01/090119081352.htm (accessed July 24, 2014).

Share This




More Matter & Energy News

Thursday, July 24, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Creative Makeovers for Ugly Cellphone Towers

Creative Makeovers for Ugly Cellphone Towers

AP (July 24, 2014) Mobile phone companies and communities across the country are going to new lengths to disguise those unsightly cellphone towers. From a church bell tower to a flagpole, even a pencil, some towers are trying to make a point. (July 24) Video provided by AP
Powered by NewsLook.com
Algonquin Power Goes Activist on Its Target Gas Natural

Algonquin Power Goes Activist on Its Target Gas Natural

TheStreet (July 23, 2014) When The Deal's Amanda Levin exclusively reported that Gas Natural had been talking to potential suitors, the Ohio company responded with a flat denial, claiming its board had not talked to anyone about a possible sale. Lo and behold, Canadian utility Algonquin Power and Utilities not only had approached the company, but it did it three times. Its last offer was for $13 per share as Gas Natural's was trading at a 60-day moving average of about $12.50 per share. Now Algonquin, which has a 4.9% stake in Gas Natural, has taken its case to shareholders, calling on them to back its proposals or, possibly, a change in the target's board. Video provided by TheStreet
Powered by NewsLook.com
Robot Parking Valet Creates Stress-Free Travel

Robot Parking Valet Creates Stress-Free Travel

AP (July 23, 2014) 'Ray' the robotic parking valet at Dusseldorf Airport in Germany lets travelers to avoid the hassle of finding a parking spot before heading to the check-in desk. (July 23) Video provided by AP
Powered by NewsLook.com
Boeing Ups Outlook on 52% Profit Jump

Boeing Ups Outlook on 52% Profit Jump

Reuters - Business Video Online (July 23, 2014) Commercial aircraft deliveries rose seven percent at Boeing, prompting the aerospace company to boost full-year profit guidance- though quarterly revenues missed analyst estimates. Bobbi Rebell reports. Video provided by Reuters
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:
from the past week

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins