Featured Research

from universities, journals, and other organizations

Riding an electron wave into the future of microchip fabrication

Date:
November 12, 2013
Source:
American Physical Society
Summary:
Advanced plasma-based etching is a key enabler of Moore's Law that observes that the number of transistors on integrated circuits doubles nearly every two years. It is the plasma's ability to reproduce fine patterns on silicon that makes this scaling possible and has made plasma sources ubiquitous in microchip manufacturing.

A plasma wave can give rise to a population of suprathermal electrons.
Credit: I.D. Kaganovich and D. Sydorenko

Advanced plasma-based etching is a key enabler of Moore's Law that observes that the number of transistors on integrated circuits doubles nearly every two years. It is the plasma's ability to reproduce fine patterns on silicon that makes this scaling possible and has made plasma sources ubiquitous in microchip manufacturing.

Related Articles


A groundbreaking fabrication technique, based on what is called a DC-augmented capacitively coupled plasma source, affords chip makers unprecedented control of the plasma. This process enables DC-electrode borne electron beams to reach and harden the surface of the mask that is used for printing the microchip circuits. More importantly, the presence of the beam creates a population of suprathermal electrons in the plasma, producing the plasma chemistry that is necessary to protect the mask. The energy of these electrons is greater than simple thermal heating could produce -- hence the name "suprathermal." But how the beam electrons transform themselves into this suprathermal population has been a puzzle.

Now a computer simulation developed at the U.S. Department of Energy's Princeton Plasma Physics Laboratory in collaboration with the University of Alberta has shed light on this transformation. The simulation reveals that the initial DC-electrode borne beam generates intense plasma waves that move through the plasma like ripples in water. And it is this beam-plasma instability that leads to the generation of the crucial suprathermal electrons.

Understanding the role these instabilities play provides a first step toward still-greater control of the plasma-surface interactions, and toward further increasing the number of transistors on integrated circuits. Insights from both numerical simulations and experiments related to beam-plasma instabilities thus portend the development of new plasma sources and the increasingly advanced chips that they fabricate.


Story Source:

The above story is based on materials provided by American Physical Society. Note: Materials may be edited for content and length.


Cite This Page:

American Physical Society. "Riding an electron wave into the future of microchip fabrication." ScienceDaily. ScienceDaily, 12 November 2013. <www.sciencedaily.com/releases/2013/11/131112200821.htm>.
American Physical Society. (2013, November 12). Riding an electron wave into the future of microchip fabrication. ScienceDaily. Retrieved January 27, 2015 from www.sciencedaily.com/releases/2013/11/131112200821.htm
American Physical Society. "Riding an electron wave into the future of microchip fabrication." ScienceDaily. www.sciencedaily.com/releases/2013/11/131112200821.htm (accessed January 27, 2015).

Share This


More From ScienceDaily



More Matter & Energy News

Tuesday, January 27, 2015

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Cablevision Enters Wi-Fi Phone Fray

Cablevision Enters Wi-Fi Phone Fray

Reuters - Business Video Online (Jan. 26, 2015) — The entry by Cablevision and Google could intensify the already heated price wars for mobile phone service. Fred Katayama reports. Video provided by Reuters
Powered by NewsLook.com
Hector the Robot Mimics a Giant Stick Insect

Hector the Robot Mimics a Giant Stick Insect

Reuters - Innovations Video Online (Jan. 26, 2015) — A robot based on a stick insect can navigate difficult terrain autonomously and adapt to its surroundings. Tara Cleary reports. Video provided by Reuters
Powered by NewsLook.com
Scientists Model Flying, Walking Drone After Vampire Bats

Scientists Model Flying, Walking Drone After Vampire Bats

Buzz60 (Jan. 26, 2015) — Swiss scientists build a new drone that can both fly and walk, modeling it after the movements of common vampire bats. Jen Markham (@jenmarkham) has the story. Video provided by Buzz60
Powered by NewsLook.com
Obama's Wildlife Plan Renews Alaska Drilling Debate

Obama's Wildlife Plan Renews Alaska Drilling Debate

Newsy (Jan. 26, 2015) — President Obama&apos;s proposal aims to protect more land in the Arctic National Wildlife Refuge, but so far, all that&apos;s materialized is a war of words. Video provided by Newsy
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
 
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:  

Breaking News:

Strange & Offbeat Stories

 

Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:  

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile iPhone Android Web
Follow Facebook Twitter Google+
Subscribe RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins