Featured Research

from universities, journals, and other organizations

'Liquid Lenses' May Shrink Feature Sizes On Microchips

Date:
July 30, 2003
Source:
National Institute Of Standards And Technology
Summary:
New data from the National Institute of Standards and Technology (NIST) will assist in the design of optics for liquid immersion lithography, an old idea that recently has attracted new interest as a possible means of improving image resolution and thereby shrinking feature sizes of computer chips.

New data from the National Institute of Standards and Technology (NIST) will assist in the design of optics for liquid immersion lithography, an old idea that recently has attracted new interest as a possible means of improving image resolution and thereby shrinking feature sizes of computer chips.

Related Articles


Conventional optical lithography has advanced sufficiently to achieve a resolution of 100 nanometers (billionths of a meter), but there are physical and technical limits to how much better it can get. By placing certain liquids between the final optical element and the silicon wafer, it may be possible to extend the resolution to 65 nanometers for state-of-the-art lithography using the 193-nanometer wavelength of light, or even 45 nanometers or below for future systems using the 157-nanometer wavelength.

A key characteristic of liquids to be used in immersion lithography is their refractive index, which affects how light bends as it crosses an interface, such as that between the liquid and a lens or a silicon wafer. Air has an index close to one. By contrast, water has a refractive index almost 50 percent higher. Placing this higher-index fluid between the lens and the silicon wafer reduces the resolution-limiting effects of diffraction, enabling imaging of smaller feature sizes.

NIST physicists recently presented preliminary measurements of the refractive index for high-purity water, considered the best candidate for a "liquid lens" at the 193-nanometer wavelength. They also determined that the index is very sensitive to temperature changes, a critical issue for optics design. A forthcoming paper describes the techniques used to make these technically difficult measurements.* Future work will focus on refining these measurements and collecting data on other liquids that may be useful in 157-nanometer lithography.

*Burnett, John H., and Simon Kaplan. In press. "Measurement of the refractive index and thermooptic coefficient of water near 193 nanometers." To appear in Proceedings of SPIE Optical Microlithography XVI (2003) 5040-188.0


Story Source:

The above story is based on materials provided by National Institute Of Standards And Technology. Note: Materials may be edited for content and length.


Cite This Page:

National Institute Of Standards And Technology. "'Liquid Lenses' May Shrink Feature Sizes On Microchips." ScienceDaily. ScienceDaily, 30 July 2003. <www.sciencedaily.com/releases/2003/07/030730080746.htm>.
National Institute Of Standards And Technology. (2003, July 30). 'Liquid Lenses' May Shrink Feature Sizes On Microchips. ScienceDaily. Retrieved January 30, 2015 from www.sciencedaily.com/releases/2003/07/030730080746.htm
National Institute Of Standards And Technology. "'Liquid Lenses' May Shrink Feature Sizes On Microchips." ScienceDaily. www.sciencedaily.com/releases/2003/07/030730080746.htm (accessed January 30, 2015).

Share This


More From ScienceDaily



More Matter & Energy News

Friday, January 30, 2015

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Tesla 'Insane Mode' Gives Unsuspecting Passengers the Ride of Their Life

Tesla 'Insane Mode' Gives Unsuspecting Passengers the Ride of Their Life

RightThisMinute (Jan. 29, 2015) — If your car has an "Insane Mode" then you know it&apos;s fast. Well, these unsuspecting passengers were in for one insane ride when they hit the button. Tesla cars are awesome. Video provided by RightThisMinute
Powered by NewsLook.com
Now Bill Gates Is 'Concerned' About Artificial Intelligence

Now Bill Gates Is 'Concerned' About Artificial Intelligence

Newsy (Jan. 29, 2015) — Bill Gates joins the list of tech moguls scared of super-intelligent machines. He says more people should be concerned, but why? Video provided by Newsy
Powered by NewsLook.com
Senate Passes Bill for Keystone XL Pipeline

Senate Passes Bill for Keystone XL Pipeline

AP (Jan. 29, 2015) — The Republican-controlled Senate has passed a bipartisan bill approving construction of the Keystone XL oil pipeline. (Jan. 29) Video provided by AP
Powered by NewsLook.com
Two Stunt Pilots Perform Incredibly Close Flyby

Two Stunt Pilots Perform Incredibly Close Flyby

Rumble (Jan. 29, 2015) — Two pilots from &apos;Escuadrilla Argentina de Acrobacia Aιrea&apos; perform an incredibly low altitude flyby stunt during a recent show exhibition in Argentina. Check it out! Video provided by Rumble
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
 
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:  

Breaking News:

Strange & Offbeat Stories

 

Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:  

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile iPhone Android Web
Follow Facebook Twitter Google+
Subscribe RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins