Featured Research

from universities, journals, and other organizations

Software Corrects Chip Errors Early

Date:
May 10, 2004
Source:
National Institute Of Standards And Technology
Summary:
Microchip miniaturization is making quality control-related measurement of features during the production process increasingly difficult.

Microchip miniaturization is making quality control-related measurement of features during the production process increasingly difficult. New National Institute of Standards and Technology (NIST) software and research results* should help manufacturers reduce errors in measuring microchip features which today measure less than 37 nanometers (about 1.5 millionths of an inch) in width and are expected to shrink to 25 nanometers (about 1 millionth of an inch) by 2007.

Currently, most semiconductor manufacturers use scanning electron microscopes (SEMs) to measure circuitry lines when the chip is first being patterned. Circuit dimensions are formed when ultraviolet light is shined on a thin film of polymer laid over silicon. Exposed areas harden, allowing unexposed areas to be chemically etched into tiny troughs for laying down circuit lines. Errors caught before etching may be correctable, while those caught later may result in scrapping the wafer and loss of a sizeable investment.

The NIST software equips the SEMs with a “model library” of possible line measurements. Technicians can use the enhanced SEMs to match measured images with library images in order to more accurately determine the shapes and sizes of features. Using the new software can cut measurement errors from tens of nanometers down to a few nanometers. The new method also is more reliable. There is about three times less variation among repeated measurements of the same circuit feature using the software than with the current most commonly used method.

NIST and International SEMATECH, a consortium of leading semiconductor manufacturers that represent about half the world's semiconductor production, funded the “model library” work.

###

* J.S. Villarrubia, A.E. Vladαr, B.D. Bunday, and M. Bishop, “Dimensional Metrology of Resist Lines Using a SEM Model-Based Library Approach," Proc. SPIE 5375, expected publication summer 2004.


Story Source:

The above story is based on materials provided by National Institute Of Standards And Technology. Note: Materials may be edited for content and length.


Cite This Page:

National Institute Of Standards And Technology. "Software Corrects Chip Errors Early." ScienceDaily. ScienceDaily, 10 May 2004. <www.sciencedaily.com/releases/2004/05/040510014641.htm>.
National Institute Of Standards And Technology. (2004, May 10). Software Corrects Chip Errors Early. ScienceDaily. Retrieved April 24, 2014 from www.sciencedaily.com/releases/2004/05/040510014641.htm
National Institute Of Standards And Technology. "Software Corrects Chip Errors Early." ScienceDaily. www.sciencedaily.com/releases/2004/05/040510014641.htm (accessed April 24, 2014).

Share This



More Computers & Math News

Thursday, April 24, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Will New FCC Rules Trigger Death Of Net Neutrality?

Will New FCC Rules Trigger Death Of Net Neutrality?

Newsy (Apr. 24, 2014) — The Federal Communications Commission will reportedly propose new rules for Net neutrality that could undermine the principles of a free and open Web. Video provided by Newsy
Powered by NewsLook.com
Apple Beats Estimates, Most Looking to Second Half of 2014

Apple Beats Estimates, Most Looking to Second Half of 2014

TheStreet (Apr. 24, 2014) — TheStreet's Stephanie Link and Real Money Contributor Dan Nathan discuss Apple's first quarter results. Link and Nathan expected the tech giant to lower guidance for the current quarter which they felt could send shares lower and present a buying opportunity. Nathan says options are cheap because Apple has been aggressively buying back shares. Video provided by TheStreet
Powered by NewsLook.com
Raw: Obama Plays Soccer With Japanese Robot

Raw: Obama Plays Soccer With Japanese Robot

AP (Apr. 24, 2014) — President Obama briefly played soccer with a robot during his visit to Japan on Thursday. The President has been emphasizing technology along with security concerns during his visit. (April 24) Video provided by AP
Powered by NewsLook.com
Obama Encourages Japanese Student-Scientists

Obama Encourages Japanese Student-Scientists

AP (Apr. 24, 2014) — President Obama spoke with student innovators in Japan and urged them to take part in increased opportunities for student exchanges with the US. (April 24) Video provided by AP
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
 
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:  

Breaking News:
from the past week

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:  

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile iPhone Android Web
Follow Facebook Twitter Google+
Subscribe RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins