Featured Research

from universities, journals, and other organizations

New Stamping Process Creates Metallic Interconnects, Nanostructures

Date:
February 26, 2007
Source:
University of Illinois at Urbana-Champaign
Summary:
Creating high-resolution metallic interconnects is an essential part of the fabrication of microchips and other nanoscale devices. Researchers at the University of Illinois at Urbana-Champaign have developed a simple and robust electrochemical process for the direct patterning of metallic interconnects and other nanostructures.

Nicholas Fang, left, a professor of mechanical science and engineering, has developed, with graduate students Keng Hao Hsu, center, and Peter Schultz, a simple and robust electrochemical nanoimprinting process with solid-state superionic stamps. (Credit: Photo by L. Brian Stauffer)
Credit: Photo by L. Brian Stauffer

Creating high-resolution metallic interconnects is an essential part of the fabrication of microchips and other nanoscale devices. Researchers at the University of Illinois at Urbana-Champaign have developed a simple and robust electrochemical process for the direct patterning of metallic interconnects and other nanostructures.

"Solid-state superionic stamping offers a new approach, both as a stand-alone process and as a complement to other nanofabrication techniques, for creating chemical sensors, photonic structures and electrical interconnects," said Nicholas X. Fang, a professor of mechanical science and engineering, and corresponding author of a paper published in the Feb. 14 issue of the journal Nano Letters.

The S4 process uses a patterned superionic material as a stamp, and etches a metallic film by an electrochemical reaction. In superionic materials, metal ions can move almost freely around the crystal lattice. These mobile materials can also be used in batteries and fuel cells.

Unlike conventional processing -- in which patterns are first placed on photoresist, followed by metal deposition and subsequent etching -- the S4 process creates high-resolution metallic nanopatterns in a single step, potentially reducing manufacturing costs and increasing yields.

The S4 process begins by carving the desired pattern into a stamp made of superionic material, such as silver sulfide, using focused ion beam milling. The stamp is then placed on the substrate and a voltage is applied. This produces an electrochemical reaction at the contact points of the interface. The reaction generates metal ions, which migrate across the interface into the stamp. As the reaction continues, the stamp progresses into the substrate, generating features complementary to the pattern on the stamp.

"The stamp acts like a sponge, soaking up metal ions," said Fang, who also is a researcher at the university's Beckman Institute for Advanced Science and Technology, and at the Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems.

"The most difficult step in the S4 process is making the stamp extremely flat and smooth," said graduate student Keng H. Hsu, the paper's lead author. "Currently, our resolution for patterning details is 50 nanometers. As better tools for engraving the stamps are developed, we will achieve finer resolution."

Ultimately, the resolution will be limited by the mechanical properties of the stamp, Hsu said.

With Fang and Hsu, co-authors of the paper are Placid M. Ferreira, a U. of I. professor of mechanical science and engineering, and director of NanoCEMMS; and graduate student Peter L. Schultz.

The work was funded by the U.S. Department of Energy and the National Science Foundation.


Story Source:

The above story is based on materials provided by University of Illinois at Urbana-Champaign. Note: Materials may be edited for content and length.


Cite This Page:

University of Illinois at Urbana-Champaign. "New Stamping Process Creates Metallic Interconnects, Nanostructures." ScienceDaily. ScienceDaily, 26 February 2007. <www.sciencedaily.com/releases/2007/02/070222160011.htm>.
University of Illinois at Urbana-Champaign. (2007, February 26). New Stamping Process Creates Metallic Interconnects, Nanostructures. ScienceDaily. Retrieved July 22, 2014 from www.sciencedaily.com/releases/2007/02/070222160011.htm
University of Illinois at Urbana-Champaign. "New Stamping Process Creates Metallic Interconnects, Nanostructures." ScienceDaily. www.sciencedaily.com/releases/2007/02/070222160011.htm (accessed July 22, 2014).

Share This




More Matter & Energy News

Tuesday, July 22, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Government Approves East Coast Oil Exploration

Government Approves East Coast Oil Exploration

AP (July 18, 2014) The Obama administration approved the use of sonic cannons to discover deposits under the ocean floor by shooting sound waves 100 times louder than a jet engine through waters shared by endangered whales and turtles. (July 18) Video provided by AP
Powered by NewsLook.com
Sunken German U-Boat Clearly Visible For First Time

Sunken German U-Boat Clearly Visible For First Time

Newsy (July 18, 2014) The wreckage of the German submarine U-166 has become clearly visible for the first time since it was discovered in 2001. Video provided by Newsy
Powered by NewsLook.com
Obama: U.S. Must Have "smartest Airports, Best Power Grid"

Obama: U.S. Must Have "smartest Airports, Best Power Grid"

Reuters - US Online Video (July 17, 2014) President Barak Obama stopped by at a lunch counter in Delaware before making remarks about boosting the nation's infrastructure. Mana Rabiee reports. Video provided by Reuters
Powered by NewsLook.com
Crude Oil Prices Bounce Back After Falling Below $100 a Barrel

Crude Oil Prices Bounce Back After Falling Below $100 a Barrel

TheStreet (July 16, 2014) Oil Futures are bouncing back after tumbling below $100 a barrel for the first time since May yesterday. Jeff Grossman is the president of BRG Brokerage and trades at the NYMEX. Grossman tells TheStreet the Middle East is always a concern for oil traders. Oil prices were pushed down in recent weeks on Libya increasing its production. Supply disruptions in Iraq fading also contributed to prices falling. News from China's economic front showing a growth for the second quarter also calmed fears on its slowdown. Jeff Grossman talks to TheStreet's Susannah Lee on this and more on the Energy Department's Energy Information Administration (EIA) report. Video provided by TheStreet
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:
from the past week

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins