Featured Research

from universities, journals, and other organizations

Lower power consumption for electronics: Thin film packaged MEMS resonator with industry record Q factor and low bias voltage

Date:
December 7, 2010
Source:
Interuniversity Microelectronics Centre (IMEC)
Summary:
An innovative SiGe (silicon germanium) thin film packaged SOI-based MEMS resonator featuring an industry-record Q factor combined with a low bias voltage has been developed. This groundbreaking resonator paves the way towards miniaturization and low power consumption of timing devices used in a variety of applications such as consumer electronics and automotive electronics.

SEM of a cross-sectional structure of the developed packaged MEMS resonator.
Credit: IMEC

Panasonic and imec present at the International Electron Devices Meeting in San Francisco an innovative SiGe (silicon germanium) thin film packaged SOI-based MEMS resonator featuring an industry-record Q factor combined with a low bias voltage. The high Q factor was achieved by implementing a resonator that operates in a torsional vibration mode, and, by vacuum encapsulation of the resonator in a thin film package.

This groundbreaking resonator paves the way towards miniaturization and low power consumption of timing devices used in a variety of applications such as consumer electronics and automotive electronics.

MEMS resonators offer enhanced miniaturization over conventional resonators such as quartz crystals and piezoelectric ceramics. However, state-of-the art MEMS resonators suffer from a low Q factor and a high bias voltage. Panasonic and imec developed a novel packaged MEMS resonator achieving the highest Q factor reported in the industry until now (220,000 at a resonant frequency f=20MHz (f•Q product of 4.3X1012Hz)) and low bias voltage by combining different advanced MEMS technologies.

The application of a torsional vibration mode enables low anchor losses and lower squeeze film damping compared to flexural mode resonators, resulting in a higher Q factor. Since the Q factor also depends on the ambient pressure and starts to decrease above a critical pressure due to viscous and squeeze film damping, imec and Panasonic vacuum encapsulated the resonator in a hermetically sealed environment. This thin-film encapsulation of the MEMS with a 4m thick SiGe film is realized with a monolithic fabrication process with the MEMS.

The narrow 130nm gap between the beam and drive and sense electrodes enables a low bias voltage (1.8Vdc) and thus eliminates a charge pump in the oscillator circuit. Moreover, using sacrificial layer etching through a microcrystalline silicon germanium layer minimizes the chances of deposition of the sealing material inside the cavity and thus enables to position the etching holes right above the beam surface, leading to a smaller chip size.

The packaged MEMS resonator was realized as part of imec's CMORE service which offers heterogeneous integration services to the industry. Imec builds on its expertise in many research areas to tune and extend CMOS processes with new processing steps to make novel CMOS micro- and nanodevices, adding functions other than logic and memory to the chips. Possible applications of such MEMS devices are smart sensors, actuators, power scavengers, resonators, biochips, micro-implantable appliances, or solar cells. Imec's CMORE services range from development-on-demand, over prototyping, to low-volume production.


Story Source:

The above story is based on materials provided by Interuniversity Microelectronics Centre (IMEC). Note: Materials may be edited for content and length.


Cite This Page:

Interuniversity Microelectronics Centre (IMEC). "Lower power consumption for electronics: Thin film packaged MEMS resonator with industry record Q factor and low bias voltage." ScienceDaily. ScienceDaily, 7 December 2010. <www.sciencedaily.com/releases/2010/12/101207092350.htm>.
Interuniversity Microelectronics Centre (IMEC). (2010, December 7). Lower power consumption for electronics: Thin film packaged MEMS resonator with industry record Q factor and low bias voltage. ScienceDaily. Retrieved July 29, 2014 from www.sciencedaily.com/releases/2010/12/101207092350.htm
Interuniversity Microelectronics Centre (IMEC). "Lower power consumption for electronics: Thin film packaged MEMS resonator with industry record Q factor and low bias voltage." ScienceDaily. www.sciencedaily.com/releases/2010/12/101207092350.htm (accessed July 29, 2014).

Share This




More Matter & Energy News

Tuesday, July 29, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Lithium Battery 'Holy Grail' Could Provide 4 Times The Power

Lithium Battery 'Holy Grail' Could Provide 4 Times The Power

Newsy (July 28, 2014) Stanford University published its findings for a "pure" lithium ion battery that could have our everyday devices and electric cars running longer. Video provided by Newsy
Powered by NewsLook.com
The Carbon Trap: US Exports Global Warming

The Carbon Trap: US Exports Global Warming

AP (July 28, 2014) AP Investigation: As the Obama administration weans the country off dirty fuels, energy companies are ramping-up overseas coal exports at a heavy price. (July 28) Video provided by AP
Powered by NewsLook.com
Shipping Crates Get New 'lease' On Life

Shipping Crates Get New 'lease' On Life

Reuters - Business Video Online (July 25, 2014) Shipping containers have been piling up as America imports more than it exports. Some university students in Washington D.C. are set to get a first-hand lesson in recycling. Their housing is being built using refashioned shipping containers. Lily Jamali reports. Video provided by Reuters
Powered by NewsLook.com
Europe's Highest Train Turns 80 in French Pyrenees

Europe's Highest Train Turns 80 in French Pyrenees

AFP (July 25, 2014) Europe's highest train, the little train of Artouste in the French Pyrenees, celebrates its 80th birthday. Duration: 01:05 Video provided by AFP
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:
from the past week

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins