Featured Research

from universities, journals, and other organizations

Ultra-thin solar blind extreme ultraviolet imager developed

Date:
December 8, 2010
Source:
Interuniversity Microelectronics Centre (IMEC)
Summary:
Researchers have developed an ultra-thin hybrid AlGaN-on-Si-based extreme ultraviolet (EUV) imager with only 10m pixel-to-pixel pitch. The wide-bandgap material (AlGaN) provides insensitivity to visible wavelengths and enhanced UV radiation hardness compared to silicon. Backside illumination in a hybrid design was used to achieve a very small pitch-to-pitch (10m only). The novel imager shows an excellent detection down to a wavelength of 1nm.

At the International Electron Devices Meeting in San Francisco, researchers with Imec presented an ultra-thin hybrid AlGaN-on-Si-based extreme ultraviolet (EUV) imager with only 10m pixel-to-pixel pitch. The wide-bandgap material (AlGaN) provides insensitivity to visible wavelengths and enhanced UV radiation hardness compared to silicon. Backside illumination in a hybrid design was used to achieve a very small pitch-to-pitch (10m only). The novel imager shows an excellent detection down to a wavelength of 1nm.

Related Articles


Ultraviolet detection is of particular interest for solar science, EUV microscopy and advanced EUV lithography tools. Sensors using wide-bandgap materials overcome the drawbacks of Si-based sensors such as their sensitivity to UV radiation damage and the need for filters to block the unnecessary visible and infrared radiation.

Imec's backside illuminated EUV imager is based on a state-of-the-art hybrid design integrating an AlGaN sensor on a silicon readout chip. A submicron thick AlGaN layer was grown on a Si(111) wafer using molecular beam epitaxy and a focal plane array of 256x256 pixels with a pixel-to-pixel pitch of 10 micron was processed. Each pixel contains a Schottky diode optimized for backside illumination. A custom read-out chip, based on capacitance transimpedance amplifiers, was fabricated in 0.35m CMOS technology. The AlGaN wafer and read-out chip were post-processed with indium solder bumps with 10m pixel-to-pixel pitch achieving excellent uniformity. The focal plane array and read-out chip were assembled using flip-chip bonding and subsequently the silicon substrate was locally removed to enable backside illumination of the active AlGaN layer. Finally, the imager was packaged and wire-bonded. Measurements demonstrated an excellent response down to a wavelength of 1nm.

These results were obtained in collaboration with CRHEA/CNRS (France) and the Royal Observatory of Belgium in the framework of the BOLD project of the European Space Agency (ESA).


Story Source:

The above story is based on materials provided by Interuniversity Microelectronics Centre (IMEC). Note: Materials may be edited for content and length.


Cite This Page:

Interuniversity Microelectronics Centre (IMEC). "Ultra-thin solar blind extreme ultraviolet imager developed." ScienceDaily. ScienceDaily, 8 December 2010. <www.sciencedaily.com/releases/2010/12/101208083529.htm>.
Interuniversity Microelectronics Centre (IMEC). (2010, December 8). Ultra-thin solar blind extreme ultraviolet imager developed. ScienceDaily. Retrieved January 26, 2015 from www.sciencedaily.com/releases/2010/12/101208083529.htm
Interuniversity Microelectronics Centre (IMEC). "Ultra-thin solar blind extreme ultraviolet imager developed." ScienceDaily. www.sciencedaily.com/releases/2010/12/101208083529.htm (accessed January 26, 2015).

Share This


More From ScienceDaily



More Matter & Energy News

Monday, January 26, 2015

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Obama Reveals Nuclear Breakthrough on Landmark India Trip

Obama Reveals Nuclear Breakthrough on Landmark India Trip

Reuters - News Video Online (Jan. 25, 2015) In a glow of bonhomie, U.S. President Barack Obama and Indian Prime Minister Narendra Modi unveil a deal aimed at unlocking billions of dollars in nuclear trade. Pavithra George reports. Video provided by Reuters
Powered by NewsLook.com
NTSB: Missing Planes' Black Boxes Should Transmit Wirelessly

NTSB: Missing Planes' Black Boxes Should Transmit Wirelessly

Newsy (Jan. 23, 2015) In light of high-profile plane disappearances in the past year, the NTSB has called for changes to make finding missing aircraft easier. Video provided by Newsy
Powered by NewsLook.com
Iconic Metal Toy Meccano Goes Robotic

Iconic Metal Toy Meccano Goes Robotic

Reuters - Innovations Video Online (Jan. 22, 2015) Classic children&apos;s toy Meccano has gone digital, releasing a programmable kit robot that can be controlled by voice recognition. The toymakers say Meccanoid G15 KS is easy to use and is compatible with existing Meccano pieces. Jim Drury reports. Video provided by Reuters
Powered by NewsLook.com
The VueXL From VX1 Immersive Smartphone Headset!

The VueXL From VX1 Immersive Smartphone Headset!

Rumble (Jan. 22, 2015) The VueXL from VX1 is a product that you install your smartphone in and with the magic of magnification lenses, enlarges your smartphones screen so that it&apos;s like looking at a big screen TV. Check it out! Video provided by Rumble
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:

Strange & Offbeat Stories


Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins