Featured Research

from universities, journals, and other organizations

Making wafers faster by making features smaller

Date:
December 14, 2010
Source:
American Institute of Physics
Summary:
Manufacturing semiconductors for electronics involves etching small features onto wafers using lasers, a process that is limited by the wavelength of the light itself. The development of a new, intense 13.5-nm light source will resolve this issue by reducing the feature size by an order of magnitude or so, according to new research.

False-color images of the tin and lithium plasma plumes in EUV emission through a 7 to 15 nm filter, obtained under identical conditions.
Credit: American Institute of Physics

The manufacturing of semiconductor wafers used in all types of electronics involves etching small features onto a wafer with lasers, a process that is ultimately limited by the wavelength of the light itself. The semiconductor industry is rapidly approaching this fundamental limit for increasing the speed of the microchip.

The development of a new intense 13.5-nm (extreme ultraviolet or EUV) light source will resolve this issue by reducing the feature size by an order of magnitude or so, according to Purdue researchers in the Journal of Applied Physics.

One way to generate this wavelength of light is to bombard tin (Sn) and lithium (Li) targets with laser beams to create an intensely bright plasma; Sn and Li are good candidates because their plasmas emit efficiently in the 13.5 nm region, says Purdue graduate student Ryan Coons. He and his colleagues used spectroscopy and a Faraday cup to analyze the emission features and debris produced in laser-produced tin and lithium plasmas, and others in his group modeled their physical processes.

In a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and Li plasmas, the group's results show that Sn plasmas produce twice as much emission as that of Li. However, the kinetic energy of Sn ions is considerably higher, though with a lower flux. More work is needed to perfect the development of this technology.


Story Source:

The above story is based on materials provided by American Institute of Physics. Note: Materials may be edited for content and length.


Journal Reference:

  1. R. W. Coons, S. S. Harilal, D. Campos, A. Hassanein. Analysis of atomic and ion debris features of laser-produced Sn and Li plasmas. Journal of Applied Physics, 2010; 108 (6): 063306 DOI: 10.1063/1.3486209

Cite This Page:

American Institute of Physics. "Making wafers faster by making features smaller." ScienceDaily. ScienceDaily, 14 December 2010. <www.sciencedaily.com/releases/2010/12/101214100232.htm>.
American Institute of Physics. (2010, December 14). Making wafers faster by making features smaller. ScienceDaily. Retrieved August 28, 2014 from www.sciencedaily.com/releases/2010/12/101214100232.htm
American Institute of Physics. "Making wafers faster by making features smaller." ScienceDaily. www.sciencedaily.com/releases/2010/12/101214100232.htm (accessed August 28, 2014).

Share This




More Matter & Energy News

Thursday, August 28, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Australian Airlines Relax Phone Ban Too

Australian Airlines Relax Phone Ban Too

Reuters - Business Video Online (Aug. 26, 2014) Qantas and Virgin say passengers can use their smartphones and tablets throughout flights after a regulator relaxed a ban on electronic devices during take-off and landing. As Hayley Platt reports the move comes as the two domestic rivals are expected to post annual net losses later this week. Video provided by Reuters
Powered by NewsLook.com
Hurricane Marie Brings Big Waves to California Coast

Hurricane Marie Brings Big Waves to California Coast

Reuters - US Online Video (Aug. 26, 2014) Huge waves generated by Hurricane Marie hit the Southern California coast. Rough Cut (no reporter narration). Video provided by Reuters
Powered by NewsLook.com
Chinese Researchers Might Be Creating Supersonic Submarine

Chinese Researchers Might Be Creating Supersonic Submarine

Newsy (Aug. 26, 2014) Chinese researchers have expanded on Cold War-era tech and are closer to building a submarine that could reach the speed of sound. Video provided by Newsy
Powered by NewsLook.com
Breakingviews: India Coal Strained by Supreme Court Ruling

Breakingviews: India Coal Strained by Supreme Court Ruling

Reuters - Business Video Online (Aug. 26, 2014) An acute coal shortage is likely to be aggravated as India's supreme court declared government coal allocations illegal, says Breakingviews' Peter Thal Larsen. Video provided by Reuters
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:
from the past week

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins