Featured Research

from universities, journals, and other organizations

Light Wave Measurements Make Circuits Better

Date:
March 15, 2004
Source:
National Institute Of Standards And Technology (NIST)
Summary:
New measurements of key wavelengths of ultraviolet light---down to a few millionths of a nanometer---are among the most precise ever reported and are improving calibrations of microlithography tools used in making integrated circuits such as those in computer chips.

Talk about precision. New measurements of key wavelengths of ultraviolet light---down to a few millionths of a nanometer---are among the most precise ever reported and are improving calibrations of microlithography tools used in making integrated circuits such as those in computer chips.

Related Articles


The dimensions involved are 10,000 times smaller than hydrogen atoms, the smallest of all atoms.

To make the measurements, physicists at the National Institute of Standards and Technology (NIST) used a spectrometer so sophisticated that it is one of only five of its kind in the world, two of which are at NIST. The spectrometer, which separates and detects specific wavelengths of light radiation, provides 10 times better resolution than similar instruments used in calibrations for highly demanding applications such as the Hubble Space Telescope. The work is reported in the February issue of the Journal of the Optical Society of America B.

The scientists measured the wavelengths of light emitted by excited atoms of iron, germanium and platinum. These elements are used as reference standards for calibrating argon flouride (ArF) excimer lasers, among the latest tools for printing integrated circuits on silicon wafers. ArF lasers are tunable over a range of approximately 0.7 nanometer (nm) centered at 193.4 nm. Precise calibration ensures that the laser light is focused properly to produce the desired circuit patterns. Improved calibrations are expected to help the semiconductor industry make circuits smaller.

The measurements were partially funded by Lambda Physik, a major supplier of lasers for microlithography applications. The results have been incorporated into commercial laser systems.


Story Source:

The above story is based on materials provided by National Institute Of Standards And Technology (NIST). Note: Materials may be edited for content and length.


Cite This Page:

National Institute Of Standards And Technology (NIST). "Light Wave Measurements Make Circuits Better." ScienceDaily. ScienceDaily, 15 March 2004. <www.sciencedaily.com/releases/2004/03/040315072834.htm>.
National Institute Of Standards And Technology (NIST). (2004, March 15). Light Wave Measurements Make Circuits Better. ScienceDaily. Retrieved October 25, 2014 from www.sciencedaily.com/releases/2004/03/040315072834.htm
National Institute Of Standards And Technology (NIST). "Light Wave Measurements Make Circuits Better." ScienceDaily. www.sciencedaily.com/releases/2004/03/040315072834.htm (accessed October 25, 2014).

Share This



More Matter & Energy News

Saturday, October 25, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

IKEA Desk Converts From Standing to Sitting With One Button

IKEA Desk Converts From Standing to Sitting With One Button

Buzz60 (Oct. 24, 2014) IKEA is out with a new convertible desk that can convert from a sitting desk to a standing one with just the push of a button. Jen Markham explains. Video provided by Buzz60
Powered by NewsLook.com
Ebola Protective Suits Being Made in China

Ebola Protective Suits Being Made in China

AFP (Oct. 24, 2014) A factory in China is busy making Ebola protective suits for healthcare workers and others fighting the spread of the virus. Duration: 00:38 Video provided by AFP
Powered by NewsLook.com
Real-Life Transformer Robot Walks, Then Folds Into a Car

Real-Life Transformer Robot Walks, Then Folds Into a Car

Buzz60 (Oct. 24, 2014) Brave Robotics and Asratec teamed with original Transformers toy company Tomy to create a functional 5-foot-tall humanoid robot that can march and fold itself into a 3-foot-long sports car. Jen Markham has the story. Video provided by Buzz60
Powered by NewsLook.com
Police Testing New Gunfire Tracking Technology

Police Testing New Gunfire Tracking Technology

AP (Oct. 24, 2014) A California-based startup has designed new law enforcement technology that aims to automatically alert dispatch when an officer's gun is unholstered and fired. Two law enforcement agencies are currently testing the technology. (Oct. 24) Video provided by AP
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:

Strange & Offbeat Stories


Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins