Featured Research

from universities, journals, and other organizations

Researchers 'heal' plasma-damaged semiconductor with treatment of hydrogen radicals

Date:
June 14, 2012
Source:
American Institute of Physics
Summary:
Researchers have developed and tested a new way to heal defects in gallium nitride (GaN), a highly promising material for a wide range of optical and high-power electronic devices.

Gallium nitride (GaN) is a highly promising material for a wide range of optical and high-power electronic devices, which can be fabricated by dry etching with plasmas. However, the plasma-induced defects and surface residues that remain after such processes tend to degrade the optical and electrical properties of the devices. A team of Japanese researchers has developed and tested a new way to "heal" such defects.

Related Articles


The team exposed plasma-damaged GaN to hydrogen (H) radicals at room temperature. After testing various doses of H radicals, the researchers evaluated the optical properties of the GaN. The intensity of light emitted when electrons near the edge of the valence shell in GaN absorbed and then re-emitted photons drastically decreased after chlorine plasma-beam etching.

After treatment with the higher-level doses of H radicals, however, the photoluminescence was restored to almost the level of un-etched GaN. The H radicals likely terminated the dangling bonds of Ga on the GaN surface, as well as desorbed the surface residues, which both led to the recovered optical performance.

A key characteristic of the new healing process, described in a paper accepted to the American Institute of Physics' journal AIP Advances, is that it is performed in situ immediately after the etching process. This is important because unwanted surface oxidation can easily occur on plasma-damaged GaN that is exposed to air.


Story Source:

The above story is based on materials provided by American Institute of Physics. Note: Materials may be edited for content and length.


Journal Reference:

  1. Shang Chen, Yi Lu, Ryosuke Kometani, Kenji Ishikawa, Hiroki Kondo, Yutaka Tokuda, Makoto Sekine, Masaru Hori. Photoluminescence recovery by in-situ exposure of plasma-damaged n-GaN to atomic hydrogen at room temperature. AIP Advances, 2012; 2 (2): 022149 DOI: 10.1063/1.4729448

Cite This Page:

American Institute of Physics. "Researchers 'heal' plasma-damaged semiconductor with treatment of hydrogen radicals." ScienceDaily. ScienceDaily, 14 June 2012. <www.sciencedaily.com/releases/2012/06/120614082631.htm>.
American Institute of Physics. (2012, June 14). Researchers 'heal' plasma-damaged semiconductor with treatment of hydrogen radicals. ScienceDaily. Retrieved November 24, 2014 from www.sciencedaily.com/releases/2012/06/120614082631.htm
American Institute of Physics. "Researchers 'heal' plasma-damaged semiconductor with treatment of hydrogen radicals." ScienceDaily. www.sciencedaily.com/releases/2012/06/120614082631.htm (accessed November 24, 2014).

Share This


More From ScienceDaily



More Matter & Energy News

Monday, November 24, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Microsoft Adds Robot Guards, Ushers In Sci-Fi Apocalypse

Microsoft Adds Robot Guards, Ushers In Sci-Fi Apocalypse

Newsy (Nov. 23, 2014) Microsoft has robotic security guards working at its Silicon Valley Campus. Video provided by Newsy
Powered by NewsLook.com
Toyota's Hydrogen Fuel-Cell Green Car Soon Available in the US

Toyota's Hydrogen Fuel-Cell Green Car Soon Available in the US

AFP (Nov. 21, 2014) Toyota presented its hydrogen fuel-cell compact car called "Mirai" to US consumers at the Los Angeles auto show. The car should go on sale in 2015 for around $60.000. It combines stored hydrogen with oxygen to generate its own power. Duration: 01:18 Video provided by AFP
Powered by NewsLook.com
Google Announces Improvements To Balloon-Borne Wi-Fi Project

Google Announces Improvements To Balloon-Borne Wi-Fi Project

Newsy (Nov. 21, 2014) In a blog post, Google said its balloons have traveled 3 million kilometers since the start of Project Loon. Video provided by Newsy
Powered by NewsLook.com
Raw: Paralyzed Marine Walks With Robotic Braces

Raw: Paralyzed Marine Walks With Robotic Braces

AP (Nov. 21, 2014) Marine Corps officials say a special operations officer left paralyzed by a sniper's bullet in Afghanistan walked using robotic leg braces in a ceremony to award him a Bronze Star. (Nov. 21) Video provided by AP
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:

Strange & Offbeat Stories


Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins