Featured Research

from universities, journals, and other organizations

Researchers 'heal' plasma-damaged semiconductor with treatment of hydrogen radicals

Date:
June 14, 2012
Source:
American Institute of Physics
Summary:
Researchers have developed and tested a new way to heal defects in gallium nitride (GaN), a highly promising material for a wide range of optical and high-power electronic devices.

Gallium nitride (GaN) is a highly promising material for a wide range of optical and high-power electronic devices, which can be fabricated by dry etching with plasmas. However, the plasma-induced defects and surface residues that remain after such processes tend to degrade the optical and electrical properties of the devices. A team of Japanese researchers has developed and tested a new way to "heal" such defects.

The team exposed plasma-damaged GaN to hydrogen (H) radicals at room temperature. After testing various doses of H radicals, the researchers evaluated the optical properties of the GaN. The intensity of light emitted when electrons near the edge of the valence shell in GaN absorbed and then re-emitted photons drastically decreased after chlorine plasma-beam etching.

After treatment with the higher-level doses of H radicals, however, the photoluminescence was restored to almost the level of un-etched GaN. The H radicals likely terminated the dangling bonds of Ga on the GaN surface, as well as desorbed the surface residues, which both led to the recovered optical performance.

A key characteristic of the new healing process, described in a paper accepted to the American Institute of Physics' journal AIP Advances, is that it is performed in situ immediately after the etching process. This is important because unwanted surface oxidation can easily occur on plasma-damaged GaN that is exposed to air.


Story Source:

The above story is based on materials provided by American Institute of Physics. Note: Materials may be edited for content and length.


Journal Reference:

  1. Shang Chen, Yi Lu, Ryosuke Kometani, Kenji Ishikawa, Hiroki Kondo, Yutaka Tokuda, Makoto Sekine, Masaru Hori. Photoluminescence recovery by in-situ exposure of plasma-damaged n-GaN to atomic hydrogen at room temperature. AIP Advances, 2012; 2 (2): 022149 DOI: 10.1063/1.4729448

Cite This Page:

American Institute of Physics. "Researchers 'heal' plasma-damaged semiconductor with treatment of hydrogen radicals." ScienceDaily. ScienceDaily, 14 June 2012. <www.sciencedaily.com/releases/2012/06/120614082631.htm>.
American Institute of Physics. (2012, June 14). Researchers 'heal' plasma-damaged semiconductor with treatment of hydrogen radicals. ScienceDaily. Retrieved October 21, 2014 from www.sciencedaily.com/releases/2012/06/120614082631.htm
American Institute of Physics. "Researchers 'heal' plasma-damaged semiconductor with treatment of hydrogen radicals." ScienceDaily. www.sciencedaily.com/releases/2012/06/120614082631.htm (accessed October 21, 2014).

Share This



More Matter & Energy News

Tuesday, October 21, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Gulfstream G500, G600 Unveiling

Gulfstream G500, G600 Unveiling

Flying (Oct. 20, 2014) Watch Gulfstream's public launch of the G500 and G600 at their headquarters in Savannah, Ga., along with a surprise unveiling of the G500, which taxied up under its own power. Video provided by Flying
Powered by NewsLook.com
Japanese Scientists Unveil Floating 3D Projection

Japanese Scientists Unveil Floating 3D Projection

Reuters - Innovations Video Online (Oct. 20, 2014) Scientists in Tokyo have demonstrated what they say is the world's first 3D projection that floats in mid air. A laser that fires a pulse up to a thousand times a second superheats molecules in the air, creating a spark which can be guided to certain points in the air to shape what the human eye perceives as an image. Matthew Stock reports. Video provided by Reuters
Powered by NewsLook.com
Hey, Doc! Sewage, Beer and Food Scraps Can Power Chevrolet’s Bi-Fuel Impala

Hey, Doc! Sewage, Beer and Food Scraps Can Power Chevrolet’s Bi-Fuel Impala

3BL Media (Oct. 20, 2014) Hey, Doc! Sewage, Beer and Food Scraps Can Power Chevrolet’s Bi-fuel Impala Video provided by 3BL
Powered by NewsLook.com
What We Know About Microsoft's Rumored Smartwatch

What We Know About Microsoft's Rumored Smartwatch

Newsy (Oct. 20, 2014) Microsoft will reportedly release a smartwatch that works across different mobile platforms, has a two-day battery life and tracks heart rate. Video provided by Newsy
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:

Strange & Offbeat Stories


Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins