Featured Research

from universities, journals, and other organizations

Sharpening focus in quantum photolithography

Date:
December 17, 2013
Source:
Springer
Summary:
Photolithography uses light beams to design thin geometric patterns on the substrates of semiconductors used in microelectronic devices. This is achieved using a chemical reaction on a light-sensitive chemical, called photoresist. The trouble is that the phenomenon of light diffraction does not permit highly accurate patterns. Now, a scientist has developed a quantum lithography protocol designed to improve the resolution of this technology.

A new protocol makes it possible to improve the accuracy of photolithography by addressing its physical limitations

Photolithography uses light beams to design thin geometric patterns on the substrates of semiconductors used in microelectronic devices. This is achieved using a chemical reaction on a light-sensitive chemical, called photoresist. The trouble is that the phenomenon of light diffraction does not permit highly accurate patterns. Often, the edges of stripes have low contrast, and the distances between the stripes and the stripes' width are limited by what is referred to as Rayleigh's diffraction limit.

Now, a scientist from Russia has developed a quantum lithography protocol designed to improve the resolution of this technology. The findings of George Miroshnichenko, a physicist at Saint Petersburg National Research University of Information Technologies, Mechanics and Optics, have just been published in EPJ D.

Until now, quantum lithograph protocols have been based on multi-photon absorption. This means that the frequency of the incoming light needed to be several times smaller than the frequency required for the absorption of a single photon, to trigger the absorption of multiple photons by the photoresist. As a result, this approach requires a higher wavelength, and produces lower resolution.

Instead, Miroshnichenko establishes the formula for the probability of a single -- and no longer multiple -- photon transition from a bound state of a quantum system to a state of continuous spectrum, using the so-called Markov approximation. This makes it possible to select the exposure time and the beam's intensity to obtain a narrow stripe in the photoresist on the substrate. Thus, in negative photoresist, this protocol can be used to create a stripe with a width equal to half the wavelength and high-contrast edges. For positive photoresist, thin stripes can be formed on the substrate with a width that is substantially smaller than the wavelength, but the distance between these stripes is equal to half the wavelength.


Story Source:

The above story is based on materials provided by Springer. Note: Materials may be edited for content and length.


Journal Reference:

  1. G. P. Miroshnichenko. Quantum lithography on bound-free transitions. The European Physical Journal D, 2013; 67 (12) DOI: 10.1140/epjd/e2013-40586-2

Cite This Page:

Springer. "Sharpening focus in quantum photolithography." ScienceDaily. ScienceDaily, 17 December 2013. <www.sciencedaily.com/releases/2013/12/131217104411.htm>.
Springer. (2013, December 17). Sharpening focus in quantum photolithography. ScienceDaily. Retrieved July 24, 2014 from www.sciencedaily.com/releases/2013/12/131217104411.htm
Springer. "Sharpening focus in quantum photolithography." ScienceDaily. www.sciencedaily.com/releases/2013/12/131217104411.htm (accessed July 24, 2014).

Share This




More Matter & Energy News

Thursday, July 24, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

TSA Administrator on Politics and Flight Bans

TSA Administrator on Politics and Flight Bans

AP (July 24, 2014) TSA administrator, John Pistole's took part in the Aspen Security Forum 2014, where he answered questions on lifting of the ban on flights into Israel's Tel Aviv airport and whether politics played a role in lifting the ban. (July 24) Video provided by AP
Powered by NewsLook.com
Creative Makeovers for Ugly Cellphone Towers

Creative Makeovers for Ugly Cellphone Towers

AP (July 24, 2014) Mobile phone companies and communities across the country are going to new lengths to disguise those unsightly cellphone towers. From a church bell tower to a flagpole, even a pencil, some towers are trying to make a point. (July 24) Video provided by AP
Powered by NewsLook.com
Algonquin Power Goes Activist on Its Target Gas Natural

Algonquin Power Goes Activist on Its Target Gas Natural

TheStreet (July 23, 2014) When The Deal's Amanda Levin exclusively reported that Gas Natural had been talking to potential suitors, the Ohio company responded with a flat denial, claiming its board had not talked to anyone about a possible sale. Lo and behold, Canadian utility Algonquin Power and Utilities not only had approached the company, but it did it three times. Its last offer was for $13 per share as Gas Natural's was trading at a 60-day moving average of about $12.50 per share. Now Algonquin, which has a 4.9% stake in Gas Natural, has taken its case to shareholders, calling on them to back its proposals or, possibly, a change in the target's board. Video provided by TheStreet
Powered by NewsLook.com
Robot Parking Valet Creates Stress-Free Travel

Robot Parking Valet Creates Stress-Free Travel

AP (July 23, 2014) 'Ray' the robotic parking valet at Dusseldorf Airport in Germany lets travelers to avoid the hassle of finding a parking spot before heading to the check-in desk. (July 23) Video provided by AP
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:
from the past week

In Other News

... from NewsDaily.com

Science News

    Health News

      Environment News

        Technology News



          Save/Print:
          Share:

          Free Subscriptions


          Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

          Get Social & Mobile


          Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

          Have Feedback?


          Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
          Mobile: iPhone Android Web
          Follow: Facebook Twitter Google+
          Subscribe: RSS Feeds Email Newsletters
          Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins