Featured Research

from universities, journals, and other organizations

Sharpening focus in quantum photolithography

Date:
December 17, 2013
Source:
Springer
Summary:
Photolithography uses light beams to design thin geometric patterns on the substrates of semiconductors used in microelectronic devices. This is achieved using a chemical reaction on a light-sensitive chemical, called photoresist. The trouble is that the phenomenon of light diffraction does not permit highly accurate patterns. Now, a scientist has developed a quantum lithography protocol designed to improve the resolution of this technology.

A new protocol makes it possible to improve the accuracy of photolithography by addressing its physical limitations

Photolithography uses light beams to design thin geometric patterns on the substrates of semiconductors used in microelectronic devices. This is achieved using a chemical reaction on a light-sensitive chemical, called photoresist. The trouble is that the phenomenon of light diffraction does not permit highly accurate patterns. Often, the edges of stripes have low contrast, and the distances between the stripes and the stripes' width are limited by what is referred to as Rayleigh's diffraction limit.

Now, a scientist from Russia has developed a quantum lithography protocol designed to improve the resolution of this technology. The findings of George Miroshnichenko, a physicist at Saint Petersburg National Research University of Information Technologies, Mechanics and Optics, have just been published in EPJ D.

Until now, quantum lithograph protocols have been based on multi-photon absorption. This means that the frequency of the incoming light needed to be several times smaller than the frequency required for the absorption of a single photon, to trigger the absorption of multiple photons by the photoresist. As a result, this approach requires a higher wavelength, and produces lower resolution.

Instead, Miroshnichenko establishes the formula for the probability of a single -- and no longer multiple -- photon transition from a bound state of a quantum system to a state of continuous spectrum, using the so-called Markov approximation. This makes it possible to select the exposure time and the beam's intensity to obtain a narrow stripe in the photoresist on the substrate. Thus, in negative photoresist, this protocol can be used to create a stripe with a width equal to half the wavelength and high-contrast edges. For positive photoresist, thin stripes can be formed on the substrate with a width that is substantially smaller than the wavelength, but the distance between these stripes is equal to half the wavelength.


Story Source:

The above story is based on materials provided by Springer. Note: Materials may be edited for content and length.


Journal Reference:

  1. G. P. Miroshnichenko. Quantum lithography on bound-free transitions. The European Physical Journal D, 2013; 67 (12) DOI: 10.1140/epjd/e2013-40586-2

Cite This Page:

Springer. "Sharpening focus in quantum photolithography." ScienceDaily. ScienceDaily, 17 December 2013. <www.sciencedaily.com/releases/2013/12/131217104411.htm>.
Springer. (2013, December 17). Sharpening focus in quantum photolithography. ScienceDaily. Retrieved October 21, 2014 from www.sciencedaily.com/releases/2013/12/131217104411.htm
Springer. "Sharpening focus in quantum photolithography." ScienceDaily. www.sciencedaily.com/releases/2013/12/131217104411.htm (accessed October 21, 2014).

Share This



More Matter & Energy News

Tuesday, October 21, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Thanks, Marty McFly! Hoverboards Could Be Coming In 2015

Thanks, Marty McFly! Hoverboards Could Be Coming In 2015

Newsy (Oct. 21, 2014) If you've ever watched "Back to the Future Part II" and wanted to get your hands on a hoverboard, well, you might soon be in luck. Video provided by Newsy
Powered by NewsLook.com
Robots to Fly Planes Where Humans Can't

Robots to Fly Planes Where Humans Can't

Reuters - Innovations Video Online (Oct. 21, 2014) Researchers in South Korea are developing a robotic pilot that could potentially replace humans in the cockpit. Unlike drones and autopilot programs which are configured for specific aircraft, the robots' humanoid design will allow it to fly any type of plane with no additional sensors. Ben Gruber reports. Video provided by Reuters
Powered by NewsLook.com
Graphene Paint Offers Rust-Free Future

Graphene Paint Offers Rust-Free Future

Reuters - Innovations Video Online (Oct. 21, 2014) British scientists have developed a prototype graphene paint that can make coatings which are resistant to liquids, gases, and chemicals. The team says the paint could have a variety of uses, from stopping ships rusting to keeping food fresher for longer. Jim Drury reports. Video provided by Reuters
Powered by NewsLook.com
Portable Breathalyzer Gets You Home Safely

Portable Breathalyzer Gets You Home Safely

Buzz60 (Oct. 21, 2014) Breeze, a portable breathalyzer, gets you home safely by instantly showing your blood alcohol content, and with one tap, lets you call an Uber, a cab or a friend from your contact list to pick you up. Sean Dowling (@SeanDowlingTV) has the details. Video provided by Buzz60
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:

Breaking News:

Strange & Offbeat Stories


Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile: iPhone Android Web
Follow: Facebook Twitter Google+
Subscribe: RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins