Featured Research

from universities, journals, and other organizations

Super-Resolution X-ray Microscopy Unveils Buried Secrets Of The Nanoworld

Date:
July 23, 2008
Source:
Ecole Polytechnique Fédérale de Lausanne
Summary:
A novel super-resolution X-ray microscope combines the high penetration power of x-rays with high spatial resolution, making it possible for the first time to shed light on the detailed interior composition of semiconductor devices and cellular structures.

The novel super-resolution X-ray microscopy method visualizes details and line defects in the buried nanostructure.
Credit: P. Thibault/ F. Pfeiffer (PSI/ EPFL)

A novel super-resolution X-ray microscope developed by a team of researchers from the Paul Scherrer Institut (PSI) and EPFL in Switzerland combines the high penetration power of x-rays with high spatial resolution, making it possible for the first time to shed light on the detailed interior composition of semiconductor devices and cellular structures.

"Researchers have been working on such super-resolution microscopy concepts for electrons and x-rays for many years," says EPFL Professor and team leader Franz Pfeiffer. "Only the construction of a dedicated multi-million Swiss-franc instrument at PSI's Swiss Light Source allowed us to achieve the stability that is necessary to implement our novel method in practice."

The new instrument uses a Megapixel Pilatus detector (whose big brother will be detecting collisions from CERN's Large Hadron Collider), which has excited the synchrotron community for its ability to count millions of single x-ray photons over a large area. This key feature makes it possible to record detailed diffraction patterns while the sample is raster-scanned through the focal spot of the beam. In contrast, conventional x-ray (or electron) scanning microscopes measure only the total transmitted intensity.

These diffraction data are then treated with an algorithm conceived by the Swiss team. "We developed an image reconstruction algorithm that deals with the several tens of thousands of diffraction images and combines them into one super-resolution x-ray micrograph," explains PSI researcher Pierre Thibault, first author on the publication. "In order to achieve images of the highest precision, the algorithm not only reconstructs the sample but also the exact shape of the light probe resulting from the x-ray beam."

Conventional electron scanning microscopes can provide high-resolution images, but usually only for the surface of the specimen, and the samples must be kept in vacuum. The Swiss team's new super-resolution microscope bypasses these requirements, meaning that scientists will now be able to look deeply into semiconductors or biological samples without altering them. It can be used to non-destructively characterize nanometer defects in buried semiconductor devices and to help improve the production and performance of future semiconductor devices with sub-hundred-nanometer features.

A further very promising application of the technique is in high-resolution life science microscopy, where the penetration power of X-rays can be used to investigate embedded cells or sub-cellular structures. Finally, the approach can also be transferred to electron or visible laser light, and help in the design of new and better light and electron microscopes.


Story Source:

The above story is based on materials provided by Ecole Polytechnique Fédérale de Lausanne. Note: Materials may be edited for content and length.


Journal Reference:

  1. P. Thibault et al. High-Resolution Scanning X-Ray Diffraction Microscopy. Science, Vol 321 (July 18, 2008)

Cite This Page:

Ecole Polytechnique Fédérale de Lausanne. "Super-Resolution X-ray Microscopy Unveils Buried Secrets Of The Nanoworld." ScienceDaily. ScienceDaily, 23 July 2008. <www.sciencedaily.com/releases/2008/07/080717140448.htm>.
Ecole Polytechnique Fédérale de Lausanne. (2008, July 23). Super-Resolution X-ray Microscopy Unveils Buried Secrets Of The Nanoworld. ScienceDaily. Retrieved September 2, 2014 from www.sciencedaily.com/releases/2008/07/080717140448.htm
Ecole Polytechnique Fédérale de Lausanne. "Super-Resolution X-ray Microscopy Unveils Buried Secrets Of The Nanoworld." ScienceDaily. www.sciencedaily.com/releases/2008/07/080717140448.htm (accessed September 2, 2014).

Share This




More Matter & Energy News

Tuesday, September 2, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Halliburton Reaches $1B Gulf Spill Settlement

Halliburton Reaches $1B Gulf Spill Settlement

AP (Sep. 2, 2014) — Halliburton's agreement to pay more than $1 billion to settle numerous claims involving the 2010 BP oil spill could be a way to diminish years of costly litigation. A federal judge still has to approve the settlement. (Sept. 2) Video provided by AP
Powered by NewsLook.com
Google Teases India Event, Possible Android One Reveal

Google Teases India Event, Possible Android One Reveal

Newsy (Sep. 1, 2014) — Google has announced a Sept. 15 event in India during which they're expected to reveal their Android One phones. Video provided by Newsy
Powered by NewsLook.com
Australian Airlines Relax Phone Ban Too

Australian Airlines Relax Phone Ban Too

Reuters - Business Video Online (Aug. 26, 2014) — Qantas and Virgin say passengers can use their smartphones and tablets throughout flights after a regulator relaxed a ban on electronic devices during take-off and landing. As Hayley Platt reports the move comes as the two domestic rivals are expected to post annual net losses later this week. Video provided by Reuters
Powered by NewsLook.com
Hurricane Marie Brings Big Waves to California Coast

Hurricane Marie Brings Big Waves to California Coast

Reuters - US Online Video (Aug. 26, 2014) — Huge waves generated by Hurricane Marie hit the Southern California coast. Rough Cut (no reporter narration). Video provided by Reuters
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
 
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:  

Breaking News:
from the past week

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:  

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile iPhone Android Web
Follow Facebook Twitter Google+
Subscribe RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins