Featured Research

from universities, journals, and other organizations

The fine art of etching

Date:
June 27, 2011
Source:
Fraunhofer-Gesellschaft
Summary:
They see more than the naked eye and could make traffic safer: miniaturized thermal imaging sensors. But they are difficult to manufacture on a commercial scale. Researchers have now developed a new system. On it, special micro-electromechanical systems can be produced – with the correct etching technique.

The fine art of etching.
Credit: Image courtesy of Fraunhofer-Gesellschaft

They see more than the naked eye and could make traffic safer: miniaturized thermal imaging sensors. But they are difficult to manufacture on a commercial scale. Researchers have now developed a new system. On it, special micro-electromechanical systems can be produced -- with the correct etching technique.

A winding country road. It is dark, and a thick ground fog has settled in. The driver of a car cautiously enters the next curve, when suddenly a caution lamp flashes -- a fallen motorcycle rider lies on the street. Thanks to the intelligent assistant, the driver has been warned and is able to brake in time. Infrared cameras see more than the naked eye and could make traffic safer. Indeed, thermal imaging cameras are already used in certain applications -- in the construction industry and the military, for example. Such infrared cameras, however, are hardly available in the mobile area, for example in automotive safety systems. The reason: long-range infrared microsensors are currently difficult to produce commercially.

Researchers of the Fraunhofer Institute for Microelectronic Circuits and Systems IMS in Duisburg, Germany, are now offering a solution. On June 22, they will be opening a new facility in which the production of such micro-system technology, or MST for short, is possible. MST involves minute sensors, valves or other mechanical components that are integrated into semiconductor chips. For instance, in airbags they serve as motion sensors, and they are no thicker than a human hair. If MST is to be applied on semiconductors and integrated, one has to master the art of etching -- which is where the researchers at IMS come in.

To apply MST to a semiconductor, one essentially puts three layers on top of each other. The bottom layer is the substrate, namely the silicon wafer; in the center there is a sacrificial layer that serves as a spacer, and this is topped by the function layer. The sacrificial layer is later etched away, leaving only the desired sensor structure behind. The problem: "Traditional etching methods allow us only to etch vertically into the layers," explains Dr. Marco Russ, project manager at IMS. "However, unsupported structures are decisive for the mechanical functions of many items of MST." In other words: the etching must work not only vertically but evenly in all directions. Experts call this process "isotropic etching." This ensures that the etching substance not only eats vertically to the substrate but also digs itself under the function layer, like a tunnel. What remains is an unsupported structure of the function layer that is only one hundred nanometers thin and connected to the substrate only at certain suspension points.

"A conventional technique is etching with liquids," says Russ. However, capillary forces can occur when the etching fluid dries. The result: the filigree membranes are glued to the substrate or are even destroyed. In addition, most etching liquids do not permit the choice of just any combination of materials for the function and sacrificial layers. "We bypass these problems with our new facility," says Russ. The highlight: "We can use two different gases in the processing chambers of the machine instead of fluids." They are highly selective: hydrogen fluoride (HF) has strong etching properties on silicon dioxide but does not affect silicon. The exact reverse is the case with xenon difluoride gas (XeF2).

"This way, we can select which material is better suited to be the function layer," says Russ. The new facility could revolutionize MST production, since the process works in a highly precise manner on an industrial scale. And: whether thermal detectors, acceleration sensors and pressure sensors or micro machines -- a multitude of MST structures can be produced in this way.


Story Source:

The above story is based on materials provided by Fraunhofer-Gesellschaft. Note: Materials may be edited for content and length.


Cite This Page:

Fraunhofer-Gesellschaft. "The fine art of etching." ScienceDaily. ScienceDaily, 27 June 2011. <www.sciencedaily.com/releases/2011/06/110627095457.htm>.
Fraunhofer-Gesellschaft. (2011, June 27). The fine art of etching. ScienceDaily. Retrieved October 22, 2014 from www.sciencedaily.com/releases/2011/06/110627095457.htm
Fraunhofer-Gesellschaft. "The fine art of etching." ScienceDaily. www.sciencedaily.com/releases/2011/06/110627095457.htm (accessed October 22, 2014).

Share This



More Matter & Energy News

Wednesday, October 22, 2014

Featured Research

from universities, journals, and other organizations


Featured Videos

from AP, Reuters, AFP, and other news services

Chameleon Camouflage to Give Tanks Cloaking Capabilities

Chameleon Camouflage to Give Tanks Cloaking Capabilities

Reuters - Innovations Video Online (Oct. 22, 2014) — Inspired by the way a chameleon changes its colour to disguise itself; scientists in Poland want to replace traditional camouflage paint with thousands of electrochromic plates that will continuously change colour to blend with its surroundings. The first PL-01 concept tank prototype will be tested within a few years, with scientists predicting that a similar technology could even be woven into the fabric of a soldiers' clothing making them virtually invisible to the naked eye. Matthew Stock reports. Video provided by Reuters
Powered by NewsLook.com
Jet Sales Lift Boeing Profit 18 Pct.

Jet Sales Lift Boeing Profit 18 Pct.

Reuters - Business Video Online (Oct. 22, 2014) — Strong jet demand has pushed Boeing to raise its profit forecast for the third time, but analysts were disappointed by its small cash flow. Fred Katayama reports. Video provided by Reuters
Powered by NewsLook.com
Internet of Things Aims to Smarten Your Life

Internet of Things Aims to Smarten Your Life

AP (Oct. 22, 2014) — As more and more Bluetooth-enabled devices are reaching consumers, developers are busy connecting them together as part of the Internet of Things. (Oct. 22) Video provided by AP
Powered by NewsLook.com
What Is Magic Leap, And Why Is It Worth $500M?

What Is Magic Leap, And Why Is It Worth $500M?

Newsy (Oct. 22, 2014) — Magic Leap isn't publicizing much more than a description of its product, but it’s been enough for Google and others to invest more than $500M. Video provided by Newsy
Powered by NewsLook.com

Search ScienceDaily

Number of stories in archives: 140,361

Find with keyword(s):
 
Enter a keyword or phrase to search ScienceDaily for related topics and research stories.

Save/Print:
Share:  

Breaking News:

Strange & Offbeat Stories

 

Space & Time

Matter & Energy

Computers & Math

In Other News

... from NewsDaily.com

Science News

Health News

Environment News

Technology News



Save/Print:
Share:  

Free Subscriptions


Get the latest science news with ScienceDaily's free email newsletters, updated daily and weekly. Or view hourly updated newsfeeds in your RSS reader:

Get Social & Mobile


Keep up to date with the latest news from ScienceDaily via social networks and mobile apps:

Have Feedback?


Tell us what you think of ScienceDaily -- we welcome both positive and negative comments. Have any problems using the site? Questions?
Mobile iPhone Android Web
Follow Facebook Twitter Google+
Subscribe RSS Feeds Email Newsletters
Latest Headlines Health & Medicine Mind & Brain Space & Time Matter & Energy Computers & Math Plants & Animals Earth & Climate Fossils & Ruins